Piezoelectric sorption sensor for mercury vapors in air using a quartz resonator

A quartz resonator with a built‐in microheater used as a piezoelectric sorption sensor for mercury vapors in the air is presented. With the construction presented here a maximum sensitivity of 3×10−6 g/m3 can be reached. The built‐in microheater heats the crystal up to 150 °C and regenerates the sensor without dismounting it from the equipment. The sensor can be used in devices for environmental pollution control and in cases in which precise determination of low mercury vapor concentrations in air is necessary.