Tri-linear color multi-linescan sensor with 200 kHz line rate

Abstract In this paper we present a newly developed linear CMOS high-speed line-scanning sensor realized in a 0.35 μm CMOS OPTO process for line-scan with 200 kHz true RGB and 600 kHz monochrome line rate, respectively. In total, 60 lines are integrated in the sensor allowing for electronic position adjustment. The lines are read out in rolling shutter manner. The high readout speed is achieved by a column-wise organization of the readout chain. At full speed, the sensor provides RGB color images with a spatial resolution down to 50 μm. This feature enables a variety of applications like quality assurance in print inspection, real-time surveillance of railroad tracks, in-line monitoring in flat panel fabrication lines and many more. The sensor has a fill-factor close to 100%, preventing aliasing and color artefacts. Hence the tri-linear technology is robust against aliasing ensuring better inspection quality and thus less waste in production lines.