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SEMICONDUCTOR MATERIALS: Finite element analysis of the temperature field in a vertical MOCVD reacto
SEMICONDUCTOR MATERIALS: Finite element analysis of the temperature field in a vertical MOCVD reacto
2009
Zhi-Ming Li
Shengrui Xu
Jincheng Zhang
Yongming Chang
Ni Jingyu
Xiaowei Zhou
Yue Hao
Keywords:
Electronic engineering
Metalorganic vapour phase epitaxy
Semiconductor
Engineering
Induction heating
Finite element method
Correction
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