Near-Angle Scatter Measurement On Diamond-Turned Surfaces

The design and operation of a near-angle scatterometer that measures the total integrated scatter (TIS) from bare and coated diamond-turned surfaces are described. The scatterometer is designed to make TIS measurements from 0.06 out to 4 deg from the specular beam. Both bare and coated diamond-turned surfaces generated on two different machines were measured. The effect of machine control on minimizing near-angle scatter is discussed.