Integration of Multiple Internal Reflection (MIR) Infrared Spectroscopy with Silicon-based Chemical Microreactors

Anisotropic etching of silicon enables the batch fabrication of crystals suitable for multiple internal reflection (MIR) IR spectroscopy. Integration of these crystals with microfluidics produces devices that permit on-line monitoring of reactions. We use these devices for in situ kinetic studies of a model reaction (hydrolysis of ethyl acetate).