Active-Passive Integration using a-Si Waveguides for Substrate Removed Electro-Optic Modulators

2018 
Amorphous silicon waveguides were integrated with substrate removed InAlGaAs/InAlAs multi quantum well waveguides in electro-optic modulators. Transitions efficiency between these waveguides is 95%. Modulation efficiency of MZMs is 0.165 V-cm.
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