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ION LITHOGRAPHY APPLICATION FOR NANOSCALE CHANNEL FORMATION IN GLASS MICROFLUID CHIPS
ION LITHOGRAPHY APPLICATION FOR NANOSCALE CHANNEL FORMATION IN GLASS MICROFLUID CHIPS
2017
Anatoly Evstrapov
Ivan Mukhin
Kukhtevich Igor
A. S. Bukatin
Keywords:
Nanotechnology
Sputter deposition
Materials science
Nanoscopic scale
Ion
Lithography
Electron microscope
Communication channel
Correction
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