BiCMOS microfluidic sensor for single cell label-free monitoring through microwave intermodulation

A novel microfluidic biosensing platform based on Bipolar-Complementary Oxide Semiconductor (BiCMOS) technology is presented. The device relies on a quadruple electrode system and a microfluidic channel that are directly integrated into the back-end-of-line (BEOL) of the BiCMOS stack. For proof of concept repeatable electrical trapping of single SW620 (colon cancer) cells in the quadruple electrode system is initially demonstrated. Additionally, for the first time a microwave intermodulation technique is used for high sensitivity dielectric spectroscopy, which could pave the way to label-free monitoring of intracellular processes and manipulation such as electroporation.