Crystallinity control of zeolite nanoparticles for the preparation of mesoporous low-k films through a fast hydrothermal process

Abstract A fast hydrothermal process for making coating solution containing MFI-type zeolite nanoparticles for the preparation of the mesoporous low- k films has been developed. The ratio of optical density (or particle crystallinity) of the nanoparticles in the films is a key factor influencing the electronic and mechanical properties. As the ratio is higher than 10%, the cracks are formed in the films, causing the decrease of the mechanical strength and the increase of the k values. Therefore, the ratio should be controlled less than 10% by using short hydrothermal time (less than 48 h). With the ratio of k values of less than 2, hardness of >1 GPa, elastic modulus of >10 GPa, and leakage current densities in the order of 10 −8  A/cm 2 , those all reach the requirements for the application in the future integrated circuits.