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A method of Ga removal from a specimen fabricated on MEMS-based chip for in-situ transmission electron microscopy
A method of Ga removal from a specimen fabricated on MEMS-based chip for in-situ transmission electron microscopy
2020
Yena Kwon
Byeong-Seon An
Yeon-Ju Shin
Cheol-Woong Yang
Keywords:
Chip
in situ transmission electron microscopy
Materials science
Optoelectronics
Microelectromechanical systems
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