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Development of Materials-based Pitch Split Process
Development of Materials-based Pitch Split Process
2016
Yoichi Hori
Ryoji Watanabe
Rikita Tsunoda
Takayoshi Mori
Hiroaki Shimizu
Akiyoshi Yamazaki
Keywords:
Chemical physics
Organic chemistry
Multiple patterning
Materials science
Photochemistry
Nanotechnology
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