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(A) three-axis nanopositioning slider design, analysis and control = 3축 나노위치결정 슬라이더의 설계, 해석 및 제어에 관한 연구
(A) three-axis nanopositioning slider design, analysis and control = 3축 나노위치결정 슬라이더의 설계, 해석 및 제어에 관한 연구
2004
Jong Youp Shim
심종엽
Keywords:
Atomic force microscopy
Control theory
Computer science
Slider
Acoustics
design analysis
Materials science
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