Sub-aperture stitching interferometry for measurement of shape error of big aperture coatings
2013
A stitching interferometry based on Zernike polynomials offsetting the reference wavefront error and deviation is introduced to measure the shape errors of big aperture coating. A planate coating with size 150mm×120mm is prepared for an experiment.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI