Platinum Based Material for Additive Technology of Gas Sensors

We prepared platinum nanoparticle ink usable for the fabrication of MEMS microheatersof high-temperature gas sensors and thermoresistors operating up to 450 °C and present somepreliminary results on the application of the ink in sensor microheater manufacturing. The inkconsists of platinum particles (3–8 nm) suspended in ethylene glycol solution of polyvinylpyrrolidone.The ink is usable in both InkJet and AerosolJet printers. The annealing at temperature of about 600 °Cleads to the formation of uniform microheater structure. The experiments on microheater agingconfirm the stability of the printed microstructure at 450 °C for at least one year of operation. Thesubstrates used for printing were thin alumina and LTCC ceramics with thickness of 12–20 μm.