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Effects of As Ions Implanted in Si Substrates on the Titanium -Silicides Formation
Effects of As Ions Implanted in Si Substrates on the Titanium -Silicides Formation
1989
Ju-hyuck Chung
Jin–Seog Choi
S. H. Paek
Keywords:
Materials science
Inorganic chemistry
Ion
Titanium
Correction
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