A raster-scanning full-motion video display using polysilicon micromachined mirrors

Abstract As portable computers become more widespread, there is increasing need for lightweight, low-power, inexpensive video displays with high information content. Many established display technologies are useful for large-format displays, but do not satisfy the weight and power requirements of demanding portable display applications. Micromachined raster-scanning displays, however, look attractive for portable computing applications. We describe the operation of a raster-scanning full-motion video display constructed using surface micromachined mirrors. The 41×52 pixel display is interfaced directly to a computer video card. Display resolution is limited by dynamic deformation of the mirror surface. Mirror-scan irregularity is shown to be negligible compared to diffraction from the mirror aperture and dynamic deformation of the mirror surface. The line-scan micromirror has been operated for more than 45 billion cycles with less than 1% change in the mirror resonant frequency.