Fabrication of bottom-up gas sensors based on individual SnO 2 nanowires and suspended microhotplates

In this work, bottom-up devices based on individual monocrystalline SnO 2 nanowires (NWs) were fabricated using FIB nanolithography on top of suspended microhotplates, with integrated heater and interdigitated microelectrodes. The electrical characterisation of such devices in the presence of different gases show that devices with improved gas sensing properties can be fabricated.