External cavity diode lasers tuned with silicon MEMS

In summary, silicon deep reactive ion etched (DRIE) MEMS actuators have enabled a small form factor, tunable laser source ideal for many DWDM applications. The performance of the MEM-ECL meets telecommunications requirements for optical power, side mode suppression, polarization extinction ratio, relative intensity noise, and linewidth. Frequency accuracy of /spl plusmn/1.25 GHz is obtained with closed loop control of the MEMS actuator voltage. Substantial immunity from external temperature fluctuations and vibrations can be achieved through a combination of thermo-mechanical design and servo control.