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Residual Strain Measurement of SOI Wafer Using Convergent Beam Electron Diffraction
Residual Strain Measurement of SOI Wafer Using Convergent Beam Electron Diffraction
2005
K. Kuramochi
Takashi Yamazaki
T Isaka
Kazuto Watanabe
Iwao Hashimoto
Keywords:
Analytical chemistry
Optoelectronics
Silicon on insulator
Beam electron
Crystallography
Wafer
Diffraction
Residual
Materials science
Reflection high-energy electron diffraction
Strain (chemistry)
Electron diffraction
residual strain
convergent beam
Correction
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