Target for radio evaporation with spatial limit the spread of the spark
2010
The present invention relates to a target for an ARC source having a first body (3) made of a material to be vaporized comprising a provided for the evaporation surface substantially in a plane, said surface surrounding a central portion in this plane, characterized in that in the central region a of the first body (3) so isolated second body (7) which preferably is formed in a disc shape electric, it is provided that from the second body (7) are provided substantially no electrons for maintaining a spark can.
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