3.08 – Micro-Imaging Systems

Nowadays, miniaturized digital image sensors are present in various applications ranging from consumer products such as camera phones to scientific and medical instruments. Because of the rapid reduction of structure size in semiconductor technology, small-sized image sensors have become feasible. Manufacturing of miniaturized cameras and the integration of these imagers into imaging microsystems are possible with advanced technologies developed in micro-optics and micromechanics. In this chapter, the general principles of image detectors and the major types of sensors are described. Aspects of process technology, packaging, and optics for miniaturized imagers are addressed. Examples of different applications are discussed for medical endoscopy, scanning microscopy, and volume products such as cellular phones.