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The Effect of TEM Specimen Preparation Method on Ultra-Thin Gate Dielectric Analysis
The Effect of TEM Specimen Preparation Method on Ultra-Thin Gate Dielectric Analysis
2003
A.Y. Du
C. H. Tung
B. H. Freitag
W.-Y. Zhang
S. Lim
E.H. Ang
Danny Ng
Keywords:
specimen preparation
Gate dielectric
Materials science
Composite material
Correction
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