Study of a Miniature Air Bearing Linear Stage System

For the purpose of micro stage used in micro positioning, a miniature aerostatic air bearing linear slide system was studied. Different arrayed micro-hole plates were fabricated. Using focused laser drilling, the diameter of the hole is limited to 300m. However, with the MEMS process, smaller diameters up to 30m could be achieved. A miniature air bearing linear slide was constructed by imbedding three developed air pads in the slider block, which could slide along a small granite straightedge to form a small sliding stage. The pressure distribution of air pad simulated by the Spectral Element Method was found in good agreement with experimental results. It was also found that the smaller the micro holes the better stability of the floating condition can be obtained. Straightness tests of the developed miniature air bearing sliding stage are carried out to show its feasibility.