The Properties of CrN/Au and Cr/CrN/Au Multilayers

E. Kolawa,D. Lie,J Reid,B Tai,L. Lowry,J. Scott-Monck

The Properties of CrN/Au and Cr/CrN/Au Multilayers

1994

E. Kolawa
D. Lie
J Reid
B Tai
L. Lowry
J. Scott-Monck

Gold has been used as a conductor material in many microelectronic applications because of its low resistivity, bondability, and oxidation/corrosion resistance.

Keywords:

Corrosion
Electrical resistivity and conductivity
Adhesion
Electrical conductor
Metallurgy
Microelectronics
Materials science
Conductor
oxidation resistance

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