Time-resolved analysis of the white photoluminescence from SiO2 films after Si and C coimplantation

P. Pellegrino,A. Pérez-Rodríguez,B. Garrido,O. González-Varona,J.R. Morante,Saulius Marcinkevicius,Augustinas Galeckas,Jan Linnros

Time-resolved analysis of the white photoluminescence from SiO2 films after Si and C coimplantation

2004

P. Pellegrino
A. Pérez-Rodríguez
B. Garrido
O. González-Varona
J.R. Morante
Saulius Marcinkevicius
Augustinas Galeckas
Jan Linnros

The analysis of the white photoluminescence (PL) from Si+ and C+ coimplanted SiO2 is reported as a function of the implanted dose. By both steady and time-resolved measurements, the presence of sev ...

Keywords:

Spectroscopy
Ion implantation
Photoluminescence
Analytical chemistry
Carbon
Silicon
Physics
time resolved spectra

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