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Epitaxial Growth of Silicon by Electron Beam Evaporation Deposition
Epitaxial Growth of Silicon by Electron Beam Evaporation Deposition
2018
Alexander Ulyashin
J. Norgaard
J S Graff
A.S. Azar
R. Dahl-Hansen
T.O. Sunde
M. Stange
Keywords:
Deposition (chemistry)
Materials science
Electron beam physical vapor deposition
Silicon
Epitaxy
electron beam deposition
Optoelectronics
Correction
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