Vibration Control in MEMS Resonator Using Positive Position Feedback (PPF) Controller

In this paper, the vibration of a micro-electromechanical resonator with positive position feedback controller is studied. The analytical results are obtained to the first order approximation by using the multiple scale perturbation technique. The stability of the steady-state solution is presented and studied applying frequency response equations near the simultaneous primary and internal resonance cases. The effects of the controller and some system parameters on the vibrating system are studied numerically. The main result of this paper indicates that it is possible to reduce the vibration for the resonator system.