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Electrochemistry of thin film battery materials prepared by low pressure chemical vapor deposition
2008
Keywords:
- Chemical vapor deposition
- Hybrid physical-chemical vapor deposition
- Thin film rechargeable lithium battery
- Thin film
- Combustion chemical vapor deposition
- Electrochemistry
- Electron beam physical vapor deposition
- Physical vapor deposition
- Inorganic chemistry
- Materials science
- Analytical chemistry
- Chemical engineering
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