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Chemical Vapor Deposition of Silicon by the Reaction of Bromosilanes and Hydrogen
Chemical Vapor Deposition of Silicon by the Reaction of Bromosilanes and Hydrogen
2013
Kazuaki Tomono
Hirotoshi Furuya
Seiji Miyamoto
Takuro Ogawa
Yuki Okamura
Ryuichi Komatsu
Masaharu Nakayama
Keywords:
Hybrid physical-chemical vapor deposition
Ion plating
Plasma processing
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Plasma-enhanced chemical vapor deposition
Pulsed laser deposition
Deposition (phase transition)
Inorganic chemistry
Materials science
Chemical engineering
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