Sensitive spin detection using an on-chip SQUID-waveguide resonator

Precise detection of spin resonance is of paramount importance to achieve coherent spin control in quantum computing. We present a setup for spin resonance measurements, which uses a dc-SQUID flux detector coupled to an antenna from a coplanar waveguide. The SQUID and the waveguide are fabricated from a 20 nm Nb thin film, allowing high magnetic field operation with the field applied parallel to the chip. We observe a resonance signal between the first and third excited states of Gd spins S = 7/2 in a CaWO4 crystal, relevant for state control in multi-level systems.