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High-Quality Polycrystalline Silicon Film Crystallized from Amorphous Silicon Film using NiCl2 Vapor
High-Quality Polycrystalline Silicon Film Crystallized from Amorphous Silicon Film using NiCl2 Vapor
2011
Seung Mo Kang
Kyung Min Ahn
Byung Tae Ahn
Keywords:
Analytical chemistry
Amorphous silicon
Thin film
Polycrystalline silicon
Leakage (electronics)
Transistor
Monocrystalline silicon
Nanocrystalline silicon
Inorganic chemistry
Chemistry
Optoelectronics
Correction
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