A High-performance Multi-level NAND Flash Memory with 43nm-node Floating-gate Technology

Multi-level programming is demonstrated with 43 nm-node NAND floating-gate megabit cells for the first time, by thinning an inter-gate dielectric film to less than 13 nm. 43 nm-node cobalt-silicide control-gate and copper bit-line technologies are developed to achieve low resistances of the word lines and bit lines.