Characterization of the Ferroelectric Imprinting Mechanism.

Abstract : Significant work was accomplished in three sections of the Category 1 test plan: PASSIVATE, FATIGUE, and COMPOSITION. Die from wafer lot RT70 were used to execute the PASSIVATE test. This test is designed to compare imprint rates for capacitors with and without the glass passivation coating. A total of 256 devices, evenly split between passivated and unpassivated, were tested with the same procedure used in the CORRELATE test. Software for data acquisition and control in the Temperature Controlled Automated Test system was completed and its function was verified. This system will perform tests in parallel on our packages each containing 16 or 24 capacitors. Packages are mounted in a temperature shock chamber that is remotely programmable to operate from -55deg to 200 degC . The four data acquisition channels can each be programmed to do a variety of ferroelectric capacitor tests including hysteresis response, pulse polarization response, fatigue, and retention. The controller can also be programmed to direct any desired sequence of ferroelectric response tests and temperature stress periods. All Category 2 and the remaining Category 1 tests (FATIGUE and COMPOSlTION) will be carried out using this facility. (jg)