Bulk acoustic wave resonator integrated microfluidics for rapid and high efficience fluids mixing and bioparticle trapping

Coupling of acoustic disturbance into microfluidics has been widely investigated for micro-mixing, fluid heating, bioparticle manipulations including trapping, sorting, focusing, and cell lysis etc. Here, we demonstrated a microfluidic system which integrated with micro-fabricated bulk acoustic wave resonator (BAW) working at frequency of 1.54 GHz. The ultra-high frequency thickness vibration mode of BAW generates violent vortices in the confined microchannel, leading to a rapid and high-efficiency fluids mixing and bio-particle trapping. The integrated platform is expected to contribute to various microfluidic applications including localized mixing and micro-scaled object collections.