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Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams
Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams
2021
Chong Ho Hong
Hyeon-Cheol Kim
Wisnu Jatmiko
Kurnianingsih
Kukjin Chun
Byung-Gook Park
Keywords:
Silicon
Materials science
Chevron (geology)
Thermal expansion
Aperture
Optics
Correction
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