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Achromatic-Multilayer Mirror for Diffraction-Limited EUV Microscopy
Achromatic-Multilayer Mirror for Diffraction-Limited EUV Microscopy
2018
Akinori Kaneko
Mitsunori Toyoda
Masaki Takata
Keywords:
Extreme ultraviolet
Microscopy
Microscope
Diffraction
Materials science
Extreme ultraviolet lithography
Optics
Achromatic lens
Correction
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