Structural Properties of Fe 3 Si thin Films at Different Pulsed-Laser-Deposition Modes

The formation and investigation of Fe3Si thin films by pulsed laser deposition is reported. The structural properties depending on the formation parameters are investigated. Three different approaches to the synthesis of iron-silicide thin films by pulsed laser deposition are explored: deposition from a stoichiometric alloy target, the simultaneous co-deposition of pure Fe and Si targets by two lasers and the single-laser cyclic co-deposition of pure targets.