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Nanoscale Smart Materials fabrication and integration in novel MEMS structures
Nanoscale Smart Materials fabrication and integration in novel MEMS structures
2010
I. Aulika
Marco Cerrato
Marco Crepaldi
Davide Dapra
Danilo Demarchi
Alice Dimonte
M. Pizzi
Pierluigi Civera
Keywords:
Fabrication
Nanotechnology
Smart material
Microelectromechanical systems
Nanoscopic scale
Materials science
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