Influence of the fabrication technique on the porous size of the polymer nanoporous antireflection coatings

The technological process of the use of polymer nanoporous antireflection film is discussed in detail. The influence of some technological conditions is also analyzed (such as the polymers' molecular weight, experimental temperature, experimental humidity, and the volatility of common solvent). It is found that different technological conditions will lead to the different porous size. The larger the porous size is, the more the scattering loss will be, so the transmission ratio of the film is low. It is indicated that the use of a low-molecular-weight polymer, an increase in the environment temperature, the reduction of the humidity, and the adoption of a low-boiling-point solvent are keys to small porous size and high transmission ratio.