Review: fine embossing of novel glasses for photonic integrated circuits
2008
Hot embossing of novel inorganic-compound glasses is a new fabrication technology for guided wave
devices and circuitry. A patterned mould is pressed into the glass above its glass transition temperature
(T g ) and replicated; cooling below T g freezes-in the required pattern. The state-of-the-art is reviewed.
Better than 0.1 μm -scale replication is shown for chalcogenide glasses and fabrication of a hot
embossed monomode waveguide demonstrated.
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