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Fabrication of SOI MOSFET by Separation by Bonding Silicon Islands (SBSI) Method
Fabrication of SOI MOSFET by Separation by Bonding Silicon Islands (SBSI) Method
2007
Kei Kanemoto
Hideaki Oka
Hirokazu Hisamatsu
Yusuke Matsuzawa
Yoji Kitano
Toshiki Hara
Masaki Hoshina
Shun-ichiro Ohmi
Juri Kato
Keywords:
Silicon on insulator
MOSFET
Electronic engineering
Silicon
Materials science
Fabrication
Optoelectronics
Correction
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