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Gettering Mechanism of Copper in n-type Silicon Wafers
Gettering Mechanism of Copper in n-type Silicon Wafers
2018
Rie Ozaki
Kazuhisa Torigoe
Taisuke Mizuno
Masashi Nishimura
Kazuhiro Yamamoto
Keywords:
Getter
Copper
Wafer
Semiconductor
Metallurgy
Silicon
Materials science
n type silicon
Optoelectronics
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