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System and method for vacuum deposition.
System and method for vacuum deposition.
1986
Steven G. Barbee
Gregory Paul Devine
William John Patrick
Gerard Seeley
Keywords:
Evaporation (deposition)
Ion plating
Electron beam physical vapor deposition
Plasma processing
Pulsed laser deposition
Analytical chemistry
Materials science
Vacuum deposition
Optoelectronics
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