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Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge.
Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge.
2019
Rainer Hippler
M. Čada
Vitezslav Stranak
Zdenek Hubicka
Keywords:
Sputter deposition
Oxygen
Argon
Ion
Analytical chemistry
Materials science
ion formation
oxygen gas
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