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Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target
Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target
2021
Bocong Zheng
Yangyang Fu
Keliang Wang
Thomas Schuelke
Qi Hua Fan
Keywords:
Optoelectronics
Materials science
Dielectric
radio frequency magnetron sputtering
electron dynamics
Argon
Correction
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