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Control of V th of the enhancement high-frequency AlGaN/GaN HEMT fabricated by oxygen-based digital etching
Control of V th of the enhancement high-frequency AlGaN/GaN HEMT fabricated by oxygen-based digital etching
2021
ping-yu tsai
Yu Chen
Chun-Hsiung Lin
Edward Yi Chang
Keywords:
Optoelectronics
Etching (microfabrication)
High-electron-mobility transistor
algan gan
Oxygen
Materials science
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