High performance wide trench IGBTs for motor control applications

IGBTs with wide trench widths offer the possibility of an improved trade-off between conduction and switching loss due to the injection enhancement effect, while preserving the devices' short-circuit withstand capability. This makes them promising candidates for motor control applications. 600 V IGBTs with trench widths of 8-12 /spl mu/m have been successfully fabricated with excellent electrical characteristics. The critical trench shaping process is accomplished by the use of a long LOCOS-like oxidation after the deep and wide trench has been etched. They offer low on-state voltage drops, low turn-off losses, square RBSOA and good short-circuit capability.