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J212021 Compound micro process for two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti
J212021 Compound micro process for two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti
2013
Shigetaka Watanabe
Yutaka Nakamitsu
Junpei Sakurai
Seiichi Hata
Keywords:
Thin film
Optics
Composite material
Amorphous metal
Materials science
micro mirror
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