Old Web
English
Sign In
Acemap
>
Paper
>
Solution Deposition of High Dielectric Constant Thin Layers.
Solution Deposition of High Dielectric Constant Thin Layers.
1996
David A. Payne
Paul G. Clem
M. H. Frey
Saumen S. Sengupta
Keywords:
Gate dielectric
Dielectric
High-κ dielectric
Thin layers
Materials science
Composite material
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]