Nano-fabrication with focused ion beams

Controlled and reproducible fabrication of nano-structured materials will constitute one of the main industrial challenges for the next 10 years. To overcome the severe limitations of existing nano-fabrication techniques, we have developed and improved the ultimate usable resolution of an innovative focused ion beam instrument (FIB). In this work we demonstrate that FIB techniques allow quite simple, direct, clean and reproducible material nano-structuring close to or below the 10 nm level.